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Surface Profile Analyzer – SPA 25 DataPhysics Instruments Logo

Surface Profile Analyzer – SPA 25

The Surface Profile Analyzer SPA 25 can measure surface topography and roughness parameters with exceptional speed and resolution. The SPA 25 utilises the white-light interferometry technique that features a height resolution of down to 0.1 nm even with small magnification factors. It can be used with either a manual or a motorised automatic sample table. Using a motorised sample table enables software controlled image stitching which combines multiple individual scans hence, larger areas of up to 300 mm x 300 mm can be visualised and analysed.

Main features

  • white-light interferometry measurement technique
  • precision piezoelectric scan drive with gauge control
  • up to 400 μm scan range (z-direction) and 11.3 μm/s scan speed at full resolution
  • USB 3 high speed camera with 1920 x 1200 pixel max. resolution and up to 3000 frames/s with restricted ROI
  • two scan modes:
    • VSI (vertical scanning interferometry) with 1 nm height resolution
    • EPSI (extended phase shift interferometry) with 0.1 nm height resolution
  • Mirau interferometer microscope objectives with different magnification factors
  • manual or automatic sample table
  • control unit with integrated powerful PC:
    • Intel® Core™ I5
    • 16 GB RAM
    • 500 GB SSD
    • NVIDIA® graphics card
    • Microsoft® Windows™ 10 Pro

Measuring head with motorised sample table, joystick and control unit of the SPA 25


The SPA 25 is controlled via the SPS 25 Surface Profile Software. It uses the industry leading MountainsMap® Imaging Topography evaluation software to analyse the surface profile. Learn more about the Software for the SPA 25.


The SPA 25 can be combined with different automatic or manual sample table as well as various Mirau microscope objectives. Learn more about the available accessories.

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Surface profile of deposited and dried silver ink picolitre droplets

Surface profile of deposited and dried silver ink picolitre droplets.