Surface Profile Analyzer – SPA 25

The Surface Profile Analyzer SPA 25 can measure surface topography and roughness parameters with exceptional speed and resolution. The SPA 25 utilizes the white-light interferometry technique that features a height resolution of down to 0.1 nm even with small magnification factors. It can be used with either a manual or a motorized automatic sample table. Using a motorized sample table enables software controlled image stitching which combines multiple individual scans hence, larger areas of up to 300 mm x 300 mm can be visualized and analyzed.

Main features

white-light interferometry measurement technique
precision piezoelectric scan drive with gauge control
up to 400 μm scan range (z-direction) and 11.3 μm/s scan speed at full resolution
USB 3 high speed camera with 1920 x 1200 pixel max. resolution and up to 3000 frames/s with restricted ROI
two scan modes:
- VSI (vertical scanning interferometry) with 1 nm height resolution
- EPSI (extended phase shift interferometry) with 0.1 nm height resolution
Mirau interferometer microscope objectives with different magnification factors
manual or automatic sample table
control unit with integrated powerful PC:
- Intel® Core™ I5
- 16 GB RAM
- 500 GB SSD
- NVIDIA® graphics card
- Microsoft® Windows™ 10 Pro

Measuring head with motorized sample table, joystick and control unit of the SPA 25

Software

The SPA 25 is controlled via the SPS 25 Surface Profile Software. It uses the industry leading MountainsMap® Imaging Topography evaluation software to analyze the surface profile. Learn more about the Software for the SPA 25.

Accessories

The SPA 25 can be combined with different automatic or manual sample table as well as various Mirau microscope objectives. Learn more about the available accessories.