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SPA – Accessories

Sample tables

Samples can be positioned either with a manual positioning table or automatically with a motorized sample table. Every motorized table includes a control joystick for easy control of the position. Using a motorized sample table enables software controlled image stitching which combines multiple individual scans hence, larger surface areas can be visualized and analyzed.

Motorized sample table with control joystick

Movement Positioning area Load capacity Resolution
Manual 73 mm x 55 mm 1 kg
Automatic 75 mm x 50 mm 1 kg 0.01 μm
Automatic 100 mm x 100 mm 2 kg 0.01 μm
Automatic 150 mm x 150 mm 3 kg 0.01 μm
Automatic 200 mm x 200 mm 3 kg 0.01 μm
Automatic 300 mm x 300 mm 5 kg 0.01 μm

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Microscope objectives

The SPA 25 uses Mirau interferometer microscope objectives. These objectives are available with different magnification factors which influence the resolution in X-Y-dimension. Note that due to the utilization of the white-light interferometry measuring technique the resolution in Z-dimension is independent of the magnification factor.

10x and 50x microscope objectives

Magnification factor Measuring field Working distance Point spacing
2.5x 7.3 mm x 4.6 mm 10.3 mm 3.8 μm
5x 3.7 mm x 2.3 mm 9.3 mm 1.9 μm
10x 1.8 mm x 1.2 mm 7.4 mm 0.96 μm
20x 0.91 mm x 0.58 mm 4.7 mm 0.48 μm
50x 0.37 mm x 0.23 mm 3.4 mm 0.19 μm
100x 0.18 mm x 0.12 mm 2 mm 0.1 μm

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